MASK ASSEMBLY FOR INSPECTING VAPOR DEPOSITION ENVIRONMENT, VAPOR DEPOSITION INSTALLATION INCLUDING THE SAME, AND METHOD FOR INSPECTING VAPOR DEPOSITION ENVIRONMENT USING VAPOR DEPOSITION INSTALLATION

摘要

PROBLEM TO BE SOLVED: To provide a mask assembly capable of inspecting a vapor deposition environment for a plurality of vapor deposition sources with one inspection substrate.SOLUTION: A vapor deposition installation comprises: a plurality of vapor deposition sources; a vapor deposition chamber; a mask assembly for inspecting a vapor deposition environment; and a transfer part. The mask assembly for inspecting the vapor deposition environment comprises: a support member; a shutter member; and drive members. The support member has a first opening part through which vapor deposition materials sequentially enter, supports a base substrate on which the deposition materials are vapor-deposited, and moves in a first direction. The shutter member has a second opening part of which an area is smaller than that of the first opening part, and housed in the support member. The drive members change the positions of the second opening part with respect to the base substrate as the support member moves.