CRYSTAL GRAIN SIZE MEASURING DEVICE AND CRYSTAL GRAIN SIZE MEASURING METHOD THEREOF

摘要

PROBLEM TO BE SOLVED: To provide a crystal grain size measuring device or a crystal grain size measuring method capable of measuring an original crystal grain size or crystal grain size distribution on the basis of a diameter of a crystal cross section on a solid cross section when detecting the cross section of a solid and measuring the grain size of a crystal of the solid.;SOLUTION: A crystal grain size measuring device comprises: detection means for detecting a shape of a cross section; first calculation means for calculating a reference value for an area ratio of a grain size; second calculation means for calculating grain size distribution included in the cross section on the basis of the detected shape of the cross section; and third calculation means for correcting the calculated grain size distribution. The first calculation means calculates the area ratio reference value of a crystal being present within the cross section from a diameter of a crystal cross section which appears on the cross section, as a reference value. The third calculation means uses the calculated reference value to calculate a correction value for an area ratio of a maximum grain size in the grain size distribution and uses the correction value for the maximum grain size to calculate a correction value for an area ratio of a grain size smaller than the maximum grain size.;COPYRIGHT: (C)2014,JPO&INPIT