JUNCTION TYPE PIEZOELECTRIC VIBRATOR, METHOD OF MANUFACTURING JUNCTION TYPE PIEZOELECTRIC VIBRATOR, ULTRASONIC PROBE AND METHOD OF MANUFACTURING ULTRASONIC PROBE

摘要

PROBLEM TO BE SOLVED: To provide a junction piezoelectric body in which uniformity of a piezoelectric body characteristic between channels is improved and an ultrasonic probe.;SOLUTION: A junction type piezoelectric vibrator includes a junction piezoelectric body formed by joining a plurality of single crystal piezoelectric elements, and electrodes provided on a first surface side and a second surface side in parallel with a first direction and a second direction intersecting with the first direction among a plurality of surfaces in the junction piezoelectric body. For the first surface, the crystal orientation of the single crystal piezoelectric elements is [100]. For at least one of the single crystal piezoelectric elements, the crystal orientation of a third surface vertical to the first direction is different from the crystal orientation of a third surface in other single crystal piezoelectric elements. For at least one of the single crystal piezoelectric elements, the crystal orientation of a fourth surface vertical to the second direction is different from the crystal orientation of a fourth surface in other single crystal piezoelectric elements. The junction piezoelectric body is formed by arranging in the second direction the row of the plurality of single crystal piezoelectric elements formed by arranging the plurality of single crystal piezoelectric elements in the first direction while making the junction positions different from each other.;COPYRIGHT: (C)2014,JPO&INPIT