METHOD FOR CENTERING VACUUM PUMP AND/OR REDUCING FLOATING MAGNETIC FIELD OF VACUUM PUMP OR FLOATING MAGNETIC FIELD OF ROTARY APPARATUS FOR VACUUM PUMP

摘要

PROBLEM TO BE SOLVED: To provide a rotary apparatus for a vacuum pump or a turbo molecular pump allowed to be continuously and surely operated without generating abrasion even at an extremely hight rotational frequency and allowing generation of only a slight floating magnetic field during operation.;SOLUTION: A magnetic field generated by a permanent magnet type magnetic bearing 44 is changed during operation of a vacuum pump so that a floating magnetic field generated by the permanent magnet type magnetic bearing 44 is reduced. Permanent magnet characteristics inherent in a shape and/or a material of the permanent magnet type magnetic bearing 44 are changed on the basis of a state of eccentricity and/or a state of the floating magnetic field.;COPYRIGHT: (C)2014,JPO&INPIT