Ion energy analyzer, electrical signal processing method, and method of operation and production of the ion energy analyzer in the ion energy analyzer within

摘要

Ion energy analyzer to determine with a '(84,136,136) and ion collector, incident grid (80,126,160), selection grid (82,134,134)', the ion energy distribution of the plasma (66) (74,122,174). The incident grid (80,126,160) has a first opening multiple dimensions is set to less than the Debye length (66) the plasma. The ion collector (84,136,136 ') is attached to the incident with the grid (80,126,160) through the (182) the first power supply. It and, provided between the '(, the selection grid (82,134,134) the incident grid the ion collector and (80,126,160) 84,136,136) is,' join the incident grid and (80,126,160) through the second power supply (180) . The ion collector (84,136,136 ') is measured and the ion flux on, to send a signal related to the ion flux, the ion collector (84,136,136' ion current meter (106), binds to) .