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The 1st population

机译:第一人口

摘要

Topic Offers the method huichiya which is used with double patterning technology is appraised of being improved.SolutionsThe 1st target population and the 2nd target population is etched in the baseplate. The 2nd target population has asymmetry vis-a-vis the 1st target population. With this, you distinguish the separate target population, at the same time can obtain the quality of the separate target population. Selective figure Figure 9
机译:<主题>提供了改进的双图案技术huichiya方法。解决方案:在基板上蚀刻第一目标人口和第二目标人口。第二目标人群相对于第一目标人群具有不对称性。这样,您就可以区分单独的目标人群,同时可以获得单独的目标人群的质量。<选择图>图9

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