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In damashin structure, composition null in order to grind the aluminum/the copper and titanium

机译:在达马申结构中,为了研磨铝/铜和钛,成分无效

摘要

This invention offers the chemical machine grinding composition in order to grind the backing material. That grinding composition, the oxidizer, the calcium ion, includes organic carboxylic acid and the water, and that grinding composition has the pH of 7 from 1.5. This invention, the backing material furthermore offers the method chemistry mechanically of grinding, with the aforementioned grinding composition.
机译:本发明提供了化学机械研磨组合物,以研磨背衬材料。该研磨组合物,氧化剂,钙离子包括有机羧酸和水,并且该研磨组合物的pH为1.5至7。本发明的背衬材料还提供了具有上述研磨组合物的机械化学研磨方法。

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