DISTRIBUTION QUANTITY SENSOR AND DISTRIBUTION QUANTITY MEASUREMENT SYSTEM

摘要

PROBLEM TO BE SOLVED: To provide a high-performance distribution quantity sensor of high reliability.;SOLUTION: The distribution quantity sensor 10 includes: a first insulation sheet 12 having a high resistance film 11 formed on one surface; a second insulation sheet 14 having a plurality of low resistance films 13 formed in a dot shape on one surface; and a plurality of electrode terminals 15 that are disposed at a rim of the high resistance film 11 and are electrically connected to the high resistance film 11. The surface resistance value of the low resistance film 13 is lower than that of the high resistance film 11. The high resistance film 11 is directly brought into contact with the low resistance film 13, and the first insulation sheet 12 is overlaid on the second insulation sheet 14.;COPYRIGHT: (C)2014,JPO&INPIT