Before deciding the position where it should do the manner and

摘要

PROBLEM TO BE SOLVED: To provide a method and device for scanning a sample by using a light beam of a light source as exactly as possible (maximum possible timing accuracy) with respect to time in order to start measurement operation during the scanning is subjected to external influence or right after being subjected thereto.;SOLUTION: The method and device for scanning the sample (i) by using the light beam (2) of the light source (3) preferably in a conforcal scanning type microscopic method, in which the light beam (2) is deflected by using a beam deflector (4) and the scanning operation is controlled by a controller (5).;COPYRIGHT: (C)2002,JPO