Non-contact measuring method and apparatus of the surface temperature

摘要

PPROBLEM TO BE SOLVED: To provide a method and a device for non-contact measurement of a surface temperature which enable temperature measurement by a thermoreflectance method at a manufacturing site. PSOLUTION: The method and the device for measuring a substrate surface temperature include: a step where elliptically polarized light is made incident on the substrate surface of a measuring object; a step where the light reflected by the substrate surface is detected through a rotary analyzer and the incident elliptically polarized light is adjusted so that a signal being double of the rotation frequency may become zero at a reference temperature; and a step where the signal of the frequency being double of the rotation frequency accompanying a temperature change from the reference temperature is detected. The temperature of the substrate surface of the measuring object is calculated on the basis of the signal of the frequency being double of the rotation frequency. PCOPYRIGHT: (C)2011,JPO&INPIT