Method for manufacturing a surface-emitting lasers, surface emitting lasers, surface emitting laser array device, an optical scanning device and image forming apparatus

摘要

PROBLEM TO BE SOLVED: To provide a highly reliable surface-emitting laser which is resistant to oxidation from the wall of an element isolation trench.;SOLUTION: A method of manufacturing the surface-emitting laser includes: a semiconductor layer formation process of forming, by epitaxial growth, a lower reflecting mirror formed by alternately laminating semiconductor films having different refractive indices, an active layer made of a semiconductor film, a current constriction layer made of a semiconductor film, and an upper reflecting mirror formed by alternately laminating semiconductor films having different refractive indices on a surface of a semiconductor substrate; a mesa structure formation process of forming a mesa structure by etching a portion of the semiconductor films formed in the semiconductor layer formation process; an element isolation trench formation process of forming an element isolation trench by etching the semiconductor films formed in the semiconductor layer formation process to the surface of the semiconductor substrate; an insulator protection film formation process of forming an insulator protection film made of an insulator on the wall of the element isolation trench; and a metal film formation process of forming a metal protection film made of a metal material on the insulator protection film.;COPYRIGHT: (C)2011,JPO&INPIT