Calibration of the radiometric optical monitoring system is used for fault detection and process monitoring

摘要

The present invention is a method and system for radiometric calibration of the spectrometer for process monitoring and fault detection. (It is examined in the spectrum of known light source is traceable to the reference standard) reference spectrograph, is checked against the primary standard local. It is checked first by when viewing the same light source, spectrometer other, together for those from the reference spectrograph, and their outputs, then, the fine adjustment for narrowband light source plasma chamber is. Plasma chamber, or in the optical chamber is disposed along the interior of the chamber, the primary local standard can be placed temporarily in place. While being optically connected to the plasma chamber, the reference spectrograph, is checked against a primary standard local. Spectrometers other, is checked against a reference spectrograph while being connected to the plasma chamber, whereby the optical path of the reference for the entire spectrometer to test all of the elements. [Selection Figure Figure 2A