Vinyl ether having both alicyclic and aromatic ring structures

摘要

PROBLEM TO BE SOLVED: To provide a new vinyl ether excellent in heat resistance, dry etching resistance and stability under a high vacuum, especially suitable as an acid-releasing protecting group of a positive type resist resin, a new alcohol becoming a raw material of the same, and methods for producing them.;SOLUTION: This vinyl ether is expressed by formula (1) wherein, any either X₁ or X₂ is vinyloxy, and the other one is H; also R₁ is 1C-3C alkyl; and R₂ is a 6C-18C aromatic hydrocarbon group.;COPYRIGHT: (C)2011,JPO&INPIT