High purity ingot melting continuous casting apparatus and high purity ingot melting continuous casting method

摘要

PROBLEM TO BE SOLVED: To provide a melting continuous casting apparatus for high purity ingot capable of producing high purity ingot which has uniform composition and shape, and the surface roughness of which is preferably suppressed.SOLUTION: There is provided a melting continuous casting method for high purity ingot. The method uses the melting continuous casting apparatus for high purity ingot, being equipment for producing ingot of metal or of inorganic compound and includes a step of cooling molten metal which flows in a casting space from a metal melting/holding part having a function for heating/melting the raw material and holding the molten metal. The melting continuous casting apparatus in which a continuous casting part is connected to a lower part of a part where the raw material is heated and melted, includes a columnar core 2 and a crucible 1 positioned above the core 2 and having the metal melting/holding part 14 having the function for heating/melting metal and holding molten metal 8. The high purity ingot is for sputtering target.