Scintillator closely linked - electron detector comprising a combination of a photomultiplier tube, X-ray detector and an electron microscope using the same

摘要

The charged particle beam apparatus comprises an electron source configured to generate an electron beam and an electron detector. The electron source is coupled to the electron column, and the electron column stores at least a system configured to guide the electron beam to the sample disposed in the sample chamber coupled to the electron column. An electronic detector includes one or more assemblies disposed in an electron column or sample chamber, each assembly is of SIPM, without using a SIPM and an optical transmitter disposed between the scintillator and SIPM Includes a scintillator rate directly coupled to the active light sensing surface. Refer to figure 1