Plasma confinement baffle and flow equilibrium device for magnetic control enhancement of plasma radiation distribution

摘要

PROBLEM TO BE SOLVED: To provide a method and a device for enhancing plasma radiation confinement by the magnetic control of radiation distribution of plasma and impedance confinement.;SOLUTION: A plasma reactor possesses the performance of plasma confinement and plasma radiation distribution. The reactor is provided with a reactor chamber including a sidewall and a workpiece support pedestal and having a pump annulation between the pedestal and the sidewall and a pump port at the bottom part of the pump annulation. The reactor is further provided with: a means for confining the gas flow in an axial direction through the pump annulation and preventing plasma from flowing to the pump port; a means for compensating for the asymmetry of a gas flow pattern of the whole pedestal generated from the arrangement of the pump port; and a means for controlling the plasma distribution having an inherent tendency to promote the edge-high plasma density distribution.;COPYRIGHT: (C)2008,JPO&INPIT