Being the shower head electrode assembly and the plasma treatment chamber null thermal

摘要

Topic The shower head electrode assembly and the plasma processing chamber which incorporates thatSolutionsThis invention is something regarding plasma processing, especially, is something regarding the plasma processing chamber and the electrode assembly which among those is used. Following to one execution form of this invention, being the thermal control board and silicon based shower head electrode and electrode assembly which includes with the adjustment catch, as for the silicon based shower head electrode, it includes with the reverse side insert which is located inside the plural part concave places and the part concave place which were formed to the reverse side of the silicon based shower head electrode, the electrode assembly is offered. The thermal control board in order to make that the adjustment catch accesses the reverse side insert possible, includes the adjustment catch passage which is formed. The adjustment catch and the reverse side insert are formed, in order to maintain the engagement of the thermal control board and the silicon based shower head electrode, and while the case of separating isolating the silicon based electrode material of the silicon based shower head electrode from friction contact with the adjustment catch, in order to make separating from the thermal control board and the silicon based shower head electrode possible. Selective figure Figure 2