Micro heater array and PN junction having micro heater array and its forming method

摘要

PROBLEM TO BE SOLVED: To provide a micro-heater array and a pn junction forming method capable of forming pn junction into the large area by forming the high-quality pn junction on an inexpensive and easily preparatory substrate such as a glass substrate.;SOLUTION: This micro-heater array includes first and second micro-heaters arranged mutually crossed or mutually juxtaposed on the substrate. The pn junction forming method by one embodiment forms the pn junction between first and second heating parts by using heating from the first and second heating parts by impressing voltage on the micro-heater array. When forming the pn junction by using the micro-heater in this way, the high-quality pn junction can be formed over the large area on the glass substrate.;COPYRIGHT: (C)2010,JPO&INPIT