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Method for adjusting optical displacement sensor, method for manufacturing optical displacement sensor, and optical displacement sensor
Method for adjusting optical displacement sensor, method for manufacturing optical displacement sensor, and optical displacement sensor
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机译:光学位移传感器的调整方法,光学位移传感器的制造方法以及光学位移传感器
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摘要
In an optical displacement sensor (10) having a predetermined optical system, the predetermined optical system is adjusted to meet the Scheimpflug condition. The predetermined optical system has a projection module (9) configured to project light onto an object to be measured (16); a light-receiving element (13) configured to receive reflected light reflected by the object to be measured (16) of light projected from the projection module (9); and a light-receiving lens (14) configured to image the reflected light onto the light-receiving element (13), the light-receiving lens being positioned between the object to be measured (16) and the light-receiving element (13). The adjustment method performs an adjustment by moving only the light-receiving lens (14) in a direction of an optical axis (Z 1 direction) of the light-receiving lens (14) and in a direction perpendicular (X 1 direction) to the direction of the optical axis of the light-receiving lens (14).
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