Magnification observation apparatus and expanding observation method, expanding observation program as well as a computer-readable recording medium

摘要

PROBLEM TO BE SOLVED: To make conversion of an inclination angle unnecessary in inclined observation using different types of observing means and facilitate coincidence of the inclination angle.;SOLUTION: A magnifying observation device comprises: still image storing means 266 for storing a still image obtained by one of electron beam imaging means 11 and optical system imaging means 12; turning position storing means 267 for storing, as first turning position information, position information corresponding to the turning position of turning means 30 when the still image is achieved; display means 2 for displaying the still image stored in the still image storing means 266 and a live image showing an observation image being observed by the other observing means than the observing means that obtained the still image, the live image being successively updated; and inclination angle converting means 261 for displaying the first turning position information indicating the inclination angle of the still image stored in the still image storing means 266 and position information corresponding to the turning position of the turning means 30 in the live image being displayed on the display means 2 as second turning position information.;COPYRIGHT: (C)2012,JPO&INPIT