Quality control manner, production manner and quality control system of semiconductor equipment

摘要

P To provide a quality control method for facilitating feedback to a manufacture site and eliminating the need of updating a relational expression, to provide a manufacturing method of a semiconductor device to which the quality control method is applied and to provide a quality control system. PSOLUTION: In the quality control method of a product manufactured by at least one process and a multiple regression formula using measured values XSBi/SBacquired in processing processes A-D and inspection processes QC1 and QC2 as explanation variables as they are and using the characteristic value Y of the product as an objective variable is used. For instance, ON the basis of the multiple regression formula and the influence ON the variations in the characteristic values Y by the variations of the measured values XSBi/SBis calculated. Also, by substituting the measured value XSBi/SBrelating to a certain product in the multiple regression formula, ON the basis of a difference between the values of respective terms of the multiple regression formula relating to the product and the variance average and the size of the influence ON the characteristic value Y by the respective processes is evaluated. PCOPYRIGHT: (C)2009 and JPO& INPIT