PROBLEM TO BE SOLVED: To approximately estimate an energy saving allowance on the assumption that slowest tuning control is applied in a multi-loop temperature control system.;SOLUTION: The energy saving allowance calculation device comprises: a low temperature time operation amount acquisition part 1 for acquiring an operation amount MVL before rise of temperature; a high temperature time operation amount acquisition part 2 for acquiring an operation amount MVH during waiting at temperature after finish of the rise of temperature; a waiting time measurement part 3 for measuring a waiting time TH of a control loop other than the slowest control loop from the time when the rise of temperature of the control loop other than the slowest control loop is finished to the time when the rise of temperature of the slowest control loop is finished; a heater capacity storage part 4 for storing information HP about a heater capacity; and an energy saving allowance calculation part 5 for calculating an energy saving allowance ES of the control loop other than the slowest control loop based on the waiting time TH, the heater capacity HP, the operation amount MVH and the operation amount MVL.;COPYRIGHT: (C)2012,JPO&INPIT
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