Metal chemical compound, the raw materials and cyclopentadiene compound null below-mentioned general

摘要

PROBLEM TO BE SOLVED: To provide an alkaline-earth metal compound which has a low melting point or is a liquid, is stable to heat and is suitable for a CVD method, ALD method or the like.;SOLUTION: The metal compound is represented by general formula (1) (wherein M is an alkaline earth metal atom; and Bu^s is a second butyl group). Magnesium, calcium, strontium, barium and radium are exemplified as the alkaline earth metal atoms represented by M. The metal compound in which M is strontium is especially preferable as a raw material for thin film production used in CVD or ALD.;COPYRIGHT: (C)2012,JPO&INPIT