The optical element and the methodological null laser beam which have the temperature sensor which is provided with form of the pixel matrix, record

摘要

As for this invention, the carrier backing material (40) with, the carrier backing material (40) the coating which is provided at least all over (39) with it has, at the same time, one temperature sensor (38) it has at least, the laser beam only induction it regards the optical element which is faired, and the method of recording beam parameter especially, in the laser system. The temperature sensor (38), it consists of the many pixel which is arranged into the matrix, one temperature receptible element (39) possesses the respective each pixel, at least. Pixel at least one temperature receptible element (39), the carrier backing material which consists of silicon (40) it is constituted inside.