Pressure flow control device with flow monitor, memory method of initial value of actual gas monitor flow, and method of confirming output of actual gas monitor flow

摘要

Connected to the downstream side of the control valve (3) and the control valve (3) constituting the pressure type flow rate control unit (1a) connected to the downstream side of the inlet side passage (8), the inlet side passage (8) The thermal flow sensor (2), the orifice (6) interposed in the fluid passage (10) communicating with the downstream side of the thermal flow sensor (2), and between the control valve (3) and the orifice (6). A temperature sensor (4) provided in the vicinity of the fluid passage (10), a pressure sensor (5) provided in the fluid passage (10) between the control valve (3) and the orifice (6), and an orifice (6). The pressure signal from the pressure sensor (5) and the temperature signal from the temperature sensor (4) are input, and the flow rate value Q of the fluid flowing through the orifice (6) is calculated. The difference between the calculated flow rate value and the set flow rate value decreases. The flow rate signal (2c) from the pressure type flow rate calculation control unit (7a) and the thermal type flow rate sensor (2) for outputting the control signal Pd for opening and closing the control valve (3) to the valve drive unit (3a) is input. And a control unit (7) including a flow rate sensor control unit (7b) for calculating and displaying the flow rate of fluid flowing through the orifice (6) from the flow rate signal (2c).