Crystalline evaluation method, crystalline evaluation device, and the computer software

摘要

A first step of measuring Raman spectroscopy peak waveform of a Raman band corresponding to the phonon modes specific to the semiconductor film, a crystalline evaluation method of the present invention, the peak waveform of a Raman band using a Gaussian function, was measured By the fitting, by means of extracting the third step, the peak value extracted in the second step of generating a first fitting waveform is a waveform that is fitted with Gaussian function, the peak value of the first fitting waveform, By then fitting the peak waveform of a Raman band Lorentz function, a fifth step of outputting a fourth step of generating a second fitting waveform is a waveform that has been fitted with Lorentzian, the half width of the second fitting waveform , and a, and a sixth step, based on the half-width or the like which is output in the fifth step, to evaluate the crystallinity of the semiconductor film.