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Tip/chip pickup and tip/chip pickup manner

机译:吸头/切屑拾取和吸头/切屑拾取方式

摘要

P To provide a chip pickup device and a chip pickup method that are capable of properly setting a pickup operation condition during picking up of a chip in a state stuck to a sheet and also monitoring a suitability of the pickup operation condition after setting. PSOLUTION: A first graph curve C1 for indicating a rising and falling pattern of a rising and falling operation of a take-out nozzle, a third graph curve C3 for indicating a flow rate pattern of an air exhausted from the take-out nozzle and a second graph curve C2 for indicating a thrust pattern of an ejector pin by an ejector mechanism are displayed as an operation condition analysis screen 25 having browsability by synchronizing each time axis thereof. Acceptance of the pickup operation condition is determined by acquiring a suction delay time TD and a flow rate variation value during suction Δ Q. This allows quantitatively and rationally grasping temporal relationship of operations of the ejector pin and the take-out nozzle. PCOPYRIGHT: (C)2012 and JPO& INPIT
机译:

提供一种芯片拾取装置和芯片拾取方法,该芯片拾取装置和芯片拾取方法能够在粘附到片材的状态下拾取芯片期间适当地设置拾取操作条件,并且能够在设置之后监视拾取操作条件的适合性。

解决方案:第一曲线C1,用于指示取出喷嘴的上升和下降操作的上升和下降模式,第三曲线C3,用于指示从取出处排出的空气的流量模式通过使每个时间轴同步,显示具有可浏览性的操作条件分析画面25,显示喷嘴和用于指示由弹出机构产生的弹出销的推力模式的第二曲线C2。通过获取抽吸延迟时间TD和抽吸期间的流量变化值来确定拾取操作条件的接受度Δ。问:这可以定量合理地掌握喷射销和取出喷嘴的时间关系。

版权:(C)2012和JPO&INPIT

著录项

  • 公开/公告号JP5348084B2

    专利类型

  • 公开/公告日2013-11-20

    原文格式PDF

  • 申请/专利权人 パナソニック株式会社;

    申请/专利号JP20100162502

  • 发明设计人 安元 隆;

    申请日2010-07-20

  • 分类号H01L21/67;H01L21/52;

  • 国家 JP

  • 入库时间 2022-08-21 16:11:32

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