The confocal scanner and the optical measuring device which uses that

摘要

A confocal opening array and a movable prism having a wedge-shaped space on the interior are attached to a single axis movable table, and a fixed prism having a wedge-shaped apex angle is provided to the exterior of the movable table. At the same time that XY scanning of the opening is achieved by means of movement of the movable table, the thickness of an equivalent plane parallel substrate varies using the pair comprising the movable prism and the fixed prism, and confocal movement (Z scanning) is also simultaneously achieved.