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Production manner of plasma generator and membrane device and membrane manner and indicating element
Production manner of plasma generator and membrane device and membrane manner and indicating element
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机译:等离子发生器和膜装置的生产方式以及膜方式和指示元件
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摘要
A deposition apparatus includes a plasma gun including a hollow cathode which generates a plasma beam into a vacuum chamber including an exhaust system and one or more intermediate electrodes to provide a potential gradient for the plasma beam, a focusing coil which is provided to surround the outer surface of a tube portion of the vacuum chamber located coaxially with the exit portion for outputting a plasma beam from the plasma gun and draws the plasma beam into the vacuum chamber through the tube portion, and a reflected electron feedback electrode which is placed inside the tube portion coaxially with the exit portion of the plasma gun and has a positive polarity.
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