Drift amendment manner of scanning-type electron microscope and scanning-type electron microscope

摘要

PPROBLEM TO BE SOLVED: To achieve a drift correction method of a scanning electron microscope, in which a drift correction that does not require a long time at mapping is possible. PSOLUTION: Electron beams are scanned from an origination coordinate to X direction (Step S201) and a drift correction is carried out using a reference image for drift correction (Step 202a). Electron beams 2 are scanned in -X direction and drift correction is carried out (Step S202b). Then, the electron beams are scanned from the origination coordinate to -Y direction and drift correction is carried out. Then, the electron beams are scanned in Y direction and drift correction is carried out (Step S202d). Thereafter, similarly, the electron beams are scanned in the X direction and the Y direction and drift correction is made for every one line. Provided that, scanning to the last Y direction is not carried out, because correction is already made by the drift correction so far carried out. PCOPYRIGHT: (C)2010,JPO&INPIT