Being the manner which calculates the deposit for the measuring object of the active genus which from manner and its system null ejector which calculate

摘要

PROBLEM TO BE SOLVED: To provide a simple method for calculating the deposition amount to the measuring object of active species emitted from an ejector to a measuring space.;SOLUTION: The method is to calculate the deposition amount to the measuring object 3 of the active species emitted from the ejector 1 to the measuring space 2. A lipid having an unsaturated double bond which is the measuring object 3 is dropped to the sample table 4 which is arranged to the measuring space 2 and of which the upper surface is a flat surface. Then, the active species are emitted from the ejector 1 at least. The plane area of the lipid immediately after the dropping and the plane area after the lapse of a predetermined time from the start of the emission are calculated. The degree of hydrolysis of the lipid is calculated based on the difference of both plane areas. The deposition amount of the active species is calculated based on the degree of hydrolysis of the lipid.;COPYRIGHT: (C)2012,JPO&INPIT