Vibration gyro element, the support structure and the gyro sensor of vibration gyro element

摘要

PPROBLEM TO BE SOLVED: To provide a miniaturizable vibration gyro element, a support structure of the vibration gyro element, and a gyro sensor, capable of keeping angular velocity detection sensitivity of the vibration gyro element, and securing support strength. PSOLUTION: This vibration gyro element is equipped on the same plane with a base part 10, a pair of detection vibration arms 11a, 11b extending linearly from the base part 10 to both sides, a pair of connection arms 13a, 13b extending from the base part 10 to both sides in the orthogonal direction to the detection vibration arms 11a, 11b, each pair of driving vibration arms 14a, 14b, 15a, 15b extending from a chip part of each connection arm to both sides orthogonally thereto, two pair of beams 20a, 20b, 21a, 21b extending along each detection arm from the base part 10, and a pair of support parts 22a, 22b where each beam extending in the same direction is connected. In the vibration gyro element, the support parts 22a, 22b are arranged outside the detection vibration arms, and between the driving vibration arms, and in the extending direction of the detection vibration arms. PCOPYRIGHT: (C)2010,JPO&INPIT