Method of Forming Nanocrystals and Method of Manufacturing an Organic Light-Emitting Display Apparatus Including a Thin Film Having Nanocrystals

摘要

A method of forming nanocrystals includes loading a substrate into a chamber, applying a first voltage to a first target to form a thin film including a first metal compound on the substrate by sputtering, and applying a second voltage to a second target and forming nanocrystals in the thin film by sputtering.