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Method for matching the impedance of the Output Impedance of a High-Frequency Power Supply Arrangement to the Impedance of a Plasma Load and High-Frequency Power Supply Arrangement
Method for matching the impedance of the Output Impedance of a High-Frequency Power Supply Arrangement to the Impedance of a Plasma Load and High-Frequency Power Supply Arrangement
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机译:使高频电源装置的输出阻抗的阻抗与等离子负载和高频电源装置的阻抗匹配的方法
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摘要
A method for matching the impedance of the output impedance of a high-frequency power supply arrangement to the impedance of a plasma load includes, in a first impedance matching mode, matching the impedance of the output impedance of the high-frequency power supply arrangement by changing the frequency of the high-frequency signal produced. If the frequency is outside a specified frequency range, in a second impedance matching mode the impedance of the output impedance of the high-frequency power supply arrangement is matched by mechanically or electrically modifying a circuit which is arranged downstream of the high-frequency signal producer.
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