Dual input interferometer beamsplitter tilt control system and flexure mounting

摘要

A novel soft beamsplitter mounting system as part of an interferometer to protect the beamsplitter substrate from external stresses and thus preserve optical flatness is introduced. The soft mounting system enables such protection by being more flexible that the beamsplitter substrate so external forces deforms the mount rather than the beamsplitter. Although the soft beamsplitter mounting configurations disclosed herein protects the beamsplitter, the interferometer itself is less stable because the mounts of the present invention allows the beamsplitter to tilt more easily than other components held in the interferometer. The improved tilt control embodiments of the present invention turns this seemingly deleterious effect into a cost saving benefit by using the inexpensive soft mounting system as a flexure to allow an improved active control system to maintain tilt alignment in a system that is more rugged than conventional interferometers.