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SYSTEMS, METHODS AND MATERIALS INCLUDING CRYSTALLIZATION OF SUBSTRATES VIA SUB-MELT LASER ANNEAL, AS WELL AS PRODUCTS PRODUCED BY SUCH PROCESSES

机译:系统,方法和材料,包括通过亚熔体激光退火对母体进行结晶,以及此类工艺生产的产品

摘要

Systems, methods, and products of processes consistent with the innovations herein relate to aspects involving crystallization of layers on substrates. In one exemplary implementation, there is provided a method of fabricating a device. Moreover, such method may include placing an amorphous/poly material on a substrate and heating the material via a sub-melt laser anneal process to transform the material into crystalline form.
机译:与本文的创新一致的系统,方法和过程产品涉及涉及衬底上的层的结晶的方面。在一个示例性实施方式中,提供了一种制造装置的方法。而且,这样的方法可以包括将非晶/多晶材料放置在基板上,并且通过亚熔融激光退火工艺来加热该材料,以将该材料转变成晶体形式。

著录项

  • 公开/公告号US2014021477A1

    专利类型

  • 公开/公告日2014-01-23

    原文格式PDF

  • 申请/专利权人 VENKATRAMAN PRABHAKAR;

    申请/专利号US201313750932

  • 发明设计人 VENKATRAMAN PRABHAKAR;

    申请日2013-01-25

  • 分类号H01L29/786;H01L21/02;

  • 国家 US

  • 入库时间 2022-08-21 16:04:57

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