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SYSTEMS, METHODS AND MATERIALS INCLUDING CRYSTALLIZATION OF SUBSTRATES VIA SUB-MELT LASER ANNEAL, AS WELL AS PRODUCTS PRODUCED BY SUCH PROCESSES
SYSTEMS, METHODS AND MATERIALS INCLUDING CRYSTALLIZATION OF SUBSTRATES VIA SUB-MELT LASER ANNEAL, AS WELL AS PRODUCTS PRODUCED BY SUCH PROCESSES
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机译:系统,方法和材料,包括通过亚熔体激光退火对母体进行结晶,以及此类工艺生产的产品
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摘要
Systems, methods, and products of processes consistent with the innovations herein relate to aspects involving crystallization of layers on substrates. In one exemplary implementation, there is provided a method of fabricating a device. Moreover, such method may include placing an amorphous/poly material on a substrate and heating the material via a sub-melt laser anneal process to transform the material into crystalline form.
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