AIRFLOW-ORGANIZATION TESTING METHOD FOR A CLEAN ROOM AND SYSTEM USING THE SAME METHOD

摘要

The present invention discloses an airflow-organization testing method for a clean room and a system using the same method, which are designed to solve the defects such as poor precision in the existing visual testing method. The airflow-organization testing method for a clean room according to the present invention uses a thermal imaging device to detect a sample gas-flow formed by a sample gas in the clean room, and the sample gas is a kind of gas, such as liquid nitrogen, dry ice or water vapor, with temperature difference from ambient air. The airflow-organization testing system for a clean room according to the present invention comprises a sample gas supplier and a thermal imaging device, wherein the thermal imaging device can continuously detect a spatial position of the sample gas and display it on a display. The airflow-organization testing method for a clean room according to the present invention has more accurate testing results and avoids contamination brought into the clean room; and, the detection devices employ mature technologies as well as high testing precision. The airflow-organization testing system for a clean room according to the present invention uses a sample gas supplier and a temperature detection device, thereby improving detection precision and expanding detection range.