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Castle-like chop mask for forming staggered datalines for improved contact isolation and pattern thereof
Castle-like chop mask for forming staggered datalines for improved contact isolation and pattern thereof
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机译:用于形成交错数据线的城堡状斩光掩模,用于改善触点隔离及其图案
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摘要
The present invention provides a castle-like shaped protect or a periphery protect or a DC chop mask for forming staggered data line patterns in semiconductor devices so as to shift the adjacent data lines from one another so as to print contacts with larger areas at one end of each data line.
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