Elastomeric parallel stage with flexural hinges to provide multi-degree-of-freedom sensitivity of an aerodynamically floated probe head to disturbance in 3D space

摘要

A method and structure for a device including a non-contact gap control device for maintaining a distance between surfaces can include a pliable platform, a frame to which the pliable platform is secured, an aerodynamic floating (AF) head attached to the pliable platform and a probe for measuring, testing, and/or characterizing a substrate adjacent to the AF head. A pressurized gas source can be coupled to the AF head, such that a pressurized gas is ejected onto the substrate to maintain a distance between the substrate and the AF head during measurement. While the frame can be held immobile, the pliable platform can react in response to irregularities in the substrate to maintain a generally constant distance between the AF head and the substrate.