ELECTROLYTE FOR REMOVING METAL-CARBIDE/NITRIDE COATINGS OR METAL-CARBIDE-NITRIDE COATINGS AND REMOVING METHOD USING SAME

摘要

An electrolyte for removing metal-carbide/nitride coatings or metal-carbide-nitride coatings from substrates, the electrolyte includes an acid, an inhibiter and a complexant. The acid is a mixture of a sulfuric acid and a weak acid. The inhibiter is an organic compound containing hydrophilic group, lipophilic group, and at least one polar group selected from nitrogen-containing group, sulfur-containing group, and hydroxyl group. The complexant is capable of complexing with Fe³⁺. A method for removing the metal-carbide/nitride coatings or metal-carbide-nitride coatings using the electrolyte is also provided.