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ATMOSPHERIC ENVIRONMENT MEASURING APPARATUS, ATMOSPHERIC ENVIRONMENT MEASURING METHOD AND ATMOSPHERIC ENVIRONMENT MEASURING SYSTEM
ATMOSPHERIC ENVIRONMENT MEASURING APPARATUS, ATMOSPHERIC ENVIRONMENT MEASURING METHOD AND ATMOSPHERIC ENVIRONMENT MEASURING SYSTEM
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机译:大气环境测量装置,大气环境测量方法和大气环境测量系统
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摘要
An atmospheric environment measuring apparatus including a filter disposed in a casing and adsorbing a component of a gas to be detected; a first mass sensor disposed in the casing between an inlet of the casing and the filter, including a first piezoelectric vibration element and changing a resonance frequency according to a mass of a substance adhered on a surface of the first piezoelectric vibration element; a second mass sensor disposed in a stage following the filter in the casing, including a second piezoelectric vibration element and changing a resonance frequency according to a mass of a substance adhered on a surface of the second piezoelectric vibration element; and a fan disposed in a stage following the second mass sensor in the casing and fluidizing atmosphere from the inlet toward an outlet of the casing.
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