Flat Field Telecentric Scanner With Diffraction Limited Performance

摘要

The present invention provides a scanning system (100) comprising a first port for receiving or emitting a stationary beam (60) of electromagnetic radiation, a second port for emitting or receiving a scanning beam of electromagnetic radiation, the scanning beam scanning in a main scanning direction, a scanning element (61) for relaying the stationary beam (60) into the scanning beam or vice versa, an optical system between the scanning element (61) and the second port, wherein the optical system comprises at least a first mirror (63) and a second mirror (64) having a rotationally symmetric curved mirror surface around their optical axis, at least one of the first and the second curved mirror surface having an aspheric shape, and wherein the first and the second mirror (63, 64) have an off-axis decentered aperture and are offset in position in a direction perpendicular to the main scanning direction.