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Mass flow controller, mass flow controller system, substrate processing device, and gas flow rate adjusting method
Mass flow controller, mass flow controller system, substrate processing device, and gas flow rate adjusting method
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机译:质量流量控制器,质量流量控制器系统,基板处理装置以及气体流量调整方法
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摘要
According to one embodiment, a flow rate adjusting unit is disposed on a gas passageway and includes a valve that adjusts the flow rate of a gas and an actuator that controls the displacement amount of the valve. A displacement amount storage unit stores displacement amount information in which a displacement amount of the valve, used when a gas flows into the gas passageway at a flow rate defined according to a process procedure before performing the process procedure, is obtained in advance for each process procedure. A setting circuit acquires the displacement amount corresponding to the process procedure from the displacement amount storage unit, and controls the actuator on the basis of the acquired displacement amount.
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