A radio-frequency heating apparatus includes a radio-frequency power generation unit (120), variable phase shift units (142a to 142d) that change a phase of a radio-frequency power generated by the radio-frequency power generation unit (120), radio-frequency power units (140a to 140d), and a control unit (110) that sets a frequency for the radio-frequency power generation unit (120) and a phase shift amount for the variable phase shift units (142a to 142d). Backward power detection units in the radio-frequency power units (140a to 140d) individually detect a reflected power and a through power at the frequency set for the radio-frequency power generation unit (120) by the control unit (110), and the control unit (110) determines a frequency for the radio-frequency power generation unit (120) and a phase shift amount for the variable phase shift units (142a to 142d) for heating the object, on the basis of the detected amplitude and phase of the reflected wave and the through wave.
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机译:射频加热装置包括射频发电单元( 120 B>),可变相移单元( 142 B> a I>至 142 B> d I>)来更改由射频功率发生单元( 120 B>),射频功率单元( 140 B> a I>至 140 B> d I>)和控制单元( 110 B>)将射频发电单元( 120 B>)的频率和可变相移单元( 142 B> a I>)的相移量设置为 142 B> d I>)。射频功率单元( 140 B> a I>至 140 B> d I>)中的后向功率检测单元分别检测反射控制单元( 110 B>)和控制单元()为射频发电单元( 120 B>)设置的频率下的功率和直通功率110 B>)确定射频发电单元的频率( 120 B>)和可变相移单元的相移量( 142 B> a I>至 142 B> d I>)以根据检测到的反射波和直通波的幅度和相位来加热物体。
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