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device microelettromeccanico with routing of signals through a protective cap and method for controlling a device microelettromeccanico
device microelettromeccanico with routing of signals through a protective cap and method for controlling a device microelettromeccanico
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机译:具有通过保护帽的信号路由的设备微电子显微镜和控制设备微电子显微镜的方法
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摘要
A microelectromechanical device includes: a body accommodating a microelectromechanical structure; and a cap bonded to the body and electrically coupled to the microelectromechanical structure through conductive bonding regions. The cap including a selection module, which has first selection terminals coupled to the microelectromechanical structure, second selection terminals, and at least one control terminal, and which can be controlled through the control terminal to couple the second selection terminals to respective first selection terminals according, selectively, to one of a plurality of coupling configurations corresponding to respective operating conditions.
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