METHOD FOR THE PRODUCTION OF A THIN GLASSY COATING ON SUBSTRATES IN ORDER TO REDUCE GAS PERMEATION

摘要

Disclosed is a method for producing a glassy, transparent coating on asubstrate by coating the substrate with asolution containing a) a polysilazane of formula -(SiR'R"-NR'")n-, wherein R',R", R"' are identical or different and independentlyrepresent hydrogen or an optionally substituted alkyl radical, aryl radical,vinyl radical, or (trialkoxysilyl)alkyl radical, n being aninteger or being calculated such that the polysilazane has a number-averagemolecular weight ranging from 150 to 150,000 g/mol,and b) a catalyst in an organic solvent, and then removing the solvent usingevaporation such that a polysilazane layer having athickness of 0.05 to 3.0 µm remains on the substrate, and irradiating thepolysilazane layer with VUV radiation having wavelengthportions 230 nm and UV radiation having wavelength portions ranging between230 and 300 nm in an atmosphere containingsteam in the presence of oxygen, active oxygen, and optional nitrogen.