TARGET MATERIAL WITH A BORON COMPOUND FOR A THIN FILM DEPOSTITION TECHNIQUE, METHOD FOR MANUFACTURING A THIN FILM ON A SUBSTRATE, HEAT RECEIVER TUBE, PARABOLIC TROUGH COLLECTOR WITH THE HEAT RECEIVER TUBE AND USE OF THE PARABOLIC TOUGH COLLECTOR

摘要

A target material for a thin film deposition technique is provided with following limitations: The target material comprises a composite material; the composite material comprises a matrix with matrix material and particles with particle material, wherein the particles are distributed in the matrix; the matrix material is an electrically conductive matrix material and the particle material is a dielectric particle material or the matrix material is a dielectric matrix material and the particle material is an electrically conductive particle material. The electrically conductive matrix material or the electrically conductive particle material comprise at least one kind of boron compound. Additionally a method for manufacturing a thin film on a substrate surface of a substrate with following steps is provided: a) Providing a substrate with a substrate surface; and b) Depositing the thin film on the substrate surface of the substrate with the aid of a thin film deposition technique, wherein the target is used. The thin film deposition technique uses a DC or a pulsed DC power supply. Additionally a parabolic trough collector is provided with at least one heat receiver tube, which is arranged in a focal line of a parabolic mirror. The parabolic trough collector is used in a solar power plant for converting solar energy into electrical energy.