ALL-METAL-PACKAGED HIGH-TEMPERATURE-RESISTANT OPTICAL-FIBRE GRATING SENSOR AND MANUFACTURING METHOD THEREFOR

摘要

A manufacturing method for an all-metal-packaged high-temperature-resistant optical-fibre grating sensor, which comprises: using a regeneration optical-fibre grating obtained via high-temperature annealing as a sensitive element so that the grating will not be erased when used at high temperature; using a magnetron sputtering method which makes an optical fibre and metal combine better to form on the surface of the optical fibre an adhesive layer and a conductive layer, thereby causing little damage to the optical fibre because of the absence of the processes of coarsening, sensitizing, etc. of chemical plating and the fact that the method is performed in an anhydrous environment; and after magnetron sputtering, using an electroplating method to thicken and form a protective layer, and embedding the optical fibre in a flexible-structure metal base through the electroplating method to achieve the all-metal package. During the whole process, no organic polymer material is used, so the application of the sensor at high temperature is ensured, and the temperature sensitivity and the strain sensitivity are improved. Meanwhile, the flexible-structure metal base also improves the strain transmission efficiency, and it is convenient to install. Also provided is an all-metal-packaged high-temperature-resistant optical-fibre grating sensor.