POSITION MATCHING STRUCTURE AND POSITION MATCHING METHOD FOR TWO-SIDED STEPPER

摘要

Disclosed are a position matching structure and a position matching method for a two-sided stepper. The position matching structure comprises a primary "+" shaped position matching mark (10), and some secondary position matching marks (20) disposed above and under the primary position matching mark and in the left and right positions of the primary position matching mark. The "+" shaped primary position matching mark (10) is formed by a horizontal primary position matching mark (11) and a vertical primary position matching mark (12) vertically crossed. The secondary position matching mark (20) is stepped, and an each secondary position matching mark is formed by some rectangles with equal widths and some rectangles with lengths forming arithmetic progression. Position matching is performed by using a "+" shaped primary position matching mark and secondary position matching marks disposed above and under the primary position matching mark and in the left and right positions of the primary position matching mark, the present invention helps a naked eye distinguish matching positions and the positions matching precision is provided, thereby reducing an error due to the manual position matching and improving the production efficiency.