Method and apparatus for improving the temperature stability and minimizing the noise of the environment that encloses an interferometric measuring system

摘要

The invention generally relates to a method and system for providing environmental control for a vibration sensitive system such as an interferometric measurement system, while minimizing acoustic noise during data acquisition. In particular the invention relates to an apparatus for providing environmental control for a vibration sensitive measurement system including a metrology instrument comprising: means for providing a thermally stable mini environment that encloses said vibration sensitive measurement system; and means for minimizing measurement error of said vibration sensitive measurement system resulting from acoustic noises and vibration